Scanning contaminant and defect detector
US4378159A · kind A · utility
143Cited by
3References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 30, 1981 |
| Grant date | Mar 29, 1983 |
| Priority date | — |
| Expiry date | Mar 30, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8901
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning laser contaminant and defect detector for reflective surfaces, having a light collector for increasing sensitivity to scattered light. The collector is preferably one quadrant of a spherical shell cradled between V-shaped reflective side walls. The collector has beam entrance and exit ports, as well as a detector port where a light detector resides. The collector is placed in proximity to a surface to be inspected. Light scattered from the test surface is directed to the reflective crown surface, then to the reflective side walls and ultimately to the detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.