Controlled porosity sheet for thermionic dispenser cathode and method of manufacture
US4379979A · kind A · utility
18Cited by
7References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 1981 |
| Grant date | Apr 12, 1983 |
| Priority date | — |
| Expiry date | Feb 6, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12361
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A controlled porosity sheet defining a surface for a thermionic dispenser thode and a method of manufacture. Starting with a generally flat silicon template substrate structure having an array of upstanding microposts 1-25 microns across on 5-100 micron spacings from each other, a layer of metal is deposited on the substrate to surround the microposts and cover the substrate structure to a desired depth. The metal layer is then abraded to a smooth, flat surface which exposes the microposts. Thereafter, the silicon substrate and microposts are completely etched away, leaving a metal sheet having micron-size holes therethrough.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.