Mask set mismatch
US4388386A · kind A · utility
19Cited by
6References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1982 |
| Grant date | Jun 14, 1983 |
| Priority date | — |
| Expiry date | Jun 7, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for marking a mask set to insure minimum mismatch between the masks when they are assembled into a set. Each mask in the set is evaluated against a known fixed standard, identified and marked such that when the set is assembled and utilized to produce an integrated circuit minimum mismatch between each element in each mask in the set will be realized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.