Recessed interdigitated integrated capacitor

US4409608A · kind A · utility

Assignee

• United States of America as represented by the Secretary of the Air Force · US

Inventor

• Max N. Yoder · Falls Church, US

Key dates

• Filing date: Apr 28, 1981
• Grant date: Oct 11, 1983
• Expiry date: Apr 28, 2001

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D84/212

Abstract

A large value capacitor having interdigitated electrodes embedded within a planar substrate of semiconductor material and a method for producing the capacitor are presented. Metallic material forming a plurality of individual electrodes is deposited within a plurality of isolated parallel spaced-apart planar recesses formed into the substrate from the planar surface by ion beam machining, etching, or the like. Alternate individual electrodes are electrically interconnected to form the interdigitated opposite electrodes of the capacitor with the dielectric comprising the high resistivity substrate material. Each of the interdigitated electrodes is connectable to other electronic members including members disposed on the same substrate.