Method of preparing zinc oxide film
US4410408A · kind A · utility
2Cited by
1References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 5, 1982 |
| Grant date | Oct 18, 1983 |
| Priority date | — |
| Expiry date | Jan 5, 2002 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/02
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method of making zinc oxide film comprises the steps of forming a zinc oxide layer on a substrate by carrying out radio-frequency sputtering with a target of zinc oxide, forming a zinc oxide layer on said zinc oxide layer by carrying out reactive, direct-current or radio-frequency sputtering with a target of zinc metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.