Suehiro Kato
5Patents
4h-index
5Co-inventors
39Inventor score
Filing activity: Jun 5, 1980 → Nov 9, 1982
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4309266A | Magnetron sputtering apparatus | Electricity | 22 | Expired |
| US4290876A | Sputtering apparatus | Performing Operations; Transporting | 21 | Expired |
| US4318796A | Sputtering apparatus | Chemistry; Metallurgy | 13 | Expired |
| US4464422A | Process for preventing oxidation of copper film on ceramic body | Performing Operations; Transporting | 5 | Expired |
| US4410408A | Method of preparing zinc oxide film | Chemistry; Metallurgy | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.