Sample transport system
US4412771A · kind A · utility
27Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 1981 |
| Grant date | Nov 1, 1983 |
| Priority date | — |
| Expiry date | Jul 30, 2001 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A sample transport system adaptable for use in an MBE instrument includes means for introducing a plurality of substrates into a storage chamber and means for conveying each substrate on a preselected basis to a processing chamber whereby the wafers not being processed are completely protected against contaminants which may occur within the processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.