Arrangement for stroboscopic potential measurements with an electron beam testing device
US4413181A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 27, 1981 |
| Grant date | Nov 1, 1983 |
| Priority date | — |
| Expiry date | Jul 27, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/045
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron beam testing device system for stroboscopic potential measurements of a test subject utilizes a scanning electron microscope having a beam suppression or blanking system. The blanking system deflects the electron beam across an aperture during each edge of a blanking pulse connected to control the blanking system so that two electron pulses are generated for each blanking pulse. A detector produces a signal responsive to a secondary electron beam resulting from impact of each of the electron pulses on the test subject. A signal processing unit with an associated gate circuit all preferably incorporated in a boxcar integrator processes only one of the two electron pulses associated with each blanking pulse. A phase control preferably within the boxcar integrator is connected to control the gate circuit and a blanking pulse generator for producing the blanking pulse.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.