Electron microscope of scanning type
US4426577A · kind A · utility
20Cited by
7References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 17, 1981 |
| Grant date | Jan 17, 1984 |
| Priority date | — |
| Expiry date | Feb 17, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/28
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron microscope of scanning type comprises first and second detectors for detecting secondary electrons emitted from a specimen irradiated by a scanning electron beam are disposed across the magnetic field of an objective lens of an electron-optical system of the microscope. The detection signals obtained from the outputs of both detectors are subjected to simultaneous signal processings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.