Charged particle beam scanning device
US4439681A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 20, 1981 |
| Grant date | Mar 27, 1984 |
| Priority date | — |
| Expiry date | Oct 20, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N3/22
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A charged particle beam scanning device is provided with two coordinates conversion circuits. For rotating the scanning direction of the charged particle beam, one of the coordinates conversion circuit is connected between a scanning signal generator and a magnification circuit, the output of which is supplied to a deflecting means for scanning the charged particle beam over the specimen surface, as in the case of a conventional device. Another coordinates conversion circuit is used for keeping independent operation of the image rotation and the image shift. This coordinates conversion circuit converts the output signal of a d.c. signal generator for image shift, and the converted signal is added to the input signal of the said magnification circuit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.