Exterior view examination apparatus
US4447731A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 3, 1981 |
| Grant date | May 8, 1984 |
| Priority date | — |
| Expiry date | Dec 3, 2001 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An exterior view examination apparatus comprising a movable sample stage provided in a sample chamber of a scanning type electron microscope; a sample mounted on the stage; and an optical microscope which can observe the sample from an exterior of the chamber, mounted on the chamber in parallel with the scanning type electron microscope, the position of a surface part of the sample (mounted on the sample stage) to be observed, measured or analyzed being preliminary defined by the optical microscope, and the sample stage being moved by a certain amount thereby to bring the sample at the center of the visual field of the electron microscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.