Asahiro Kuni
41Patents
15h-index
52Co-inventors
84Inventor score
Filing activity: Aug 17, 1976 → Oct 31, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5986263A | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 106 | Expired |
| US4449818A | Method of inspecting microscopic surface defects | Physics | 90 | Expired |
| US6587581B1 | Visual inspection method and apparatus therefor | Electricity | 86 | Expired |
| US6465781B1 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Electricity | 43 | Expired |
| US4153371A | Method and apparatus for reduction-projection type mask alignment | Physics | 40 | Expired |
| US4213117A | Method and apparatus for detecting positions of chips on a semiconductor wafer | Electricity | 32 | Expired |
| US6087673A | Method of inspecting pattern and apparatus thereof | Physics | 31 | Expired |
| US6172365A | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 30 | Expired |
| US6347150B1 | Method and system for inspecting a pattern | Physics | 27 | Expired |
| US4666291A | Light-exposure apparatus | Physics | 27 | Expired |
| US4447731A | Exterior view examination apparatus | Electricity | 25 | Expired |
| US4777641A | Method and apparatus for alignment | Physics | 22 | Expired |
| US6898305B2 | Circuit pattern inspection method and apparatus | Physics | 19 | Expired |
| US4814615A | Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure | Electricity | 17 | Expired |
| US4095905A | Surface-defect detecting device | Physics | 16 | Expired |
| US4242702A | Apparatus for automatically checking external appearance of object | Physics | 15 | Expired |
| US6373054B1 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 13 | Expired |
| US4788577A | Substrate surface deflecting device | Physics | 13 | Expired |
| US4504045A | Wafer transforming device | Electricity | 12 | Expired |
| US7269280B2 | Method and its apparatus for inspecting a pattern | Physics | 12 | Expired |
| US5463667A | Inspection method for soldered joints using x-ray imaging and apparatus therefor | Physics | 9 | Expired |
| US7133550B2 | Pattern inspection method and apparatus | Electricity | 9 | Expired |
| US4708484A | Projection alignment method and apparatus | Physics | 8 | Expired |
| US6975754B2 | Circuit pattern inspection method and apparatus | Physics | 8 | Expired |
| US6717142B2 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.