Inventor · Tokyo, JP

Asahiro Kuni

41Patents
15h-index
52Co-inventors
84Inventor score

Filing activity: Aug 17, 1976 → Oct 31, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US5986263A Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Electricity 106 Expired
US4449818A Method of inspecting microscopic surface defects Physics 90 Expired
US6587581B1 Visual inspection method and apparatus therefor Electricity 86 Expired
US6465781B1 Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus Electricity 43 Expired
US4153371A Method and apparatus for reduction-projection type mask alignment Physics 40 Expired
US4213117A Method and apparatus for detecting positions of chips on a semiconductor wafer Electricity 32 Expired
US6087673A Method of inspecting pattern and apparatus thereof Physics 31 Expired
US6172365A Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Electricity 30 Expired
US6347150B1 Method and system for inspecting a pattern Physics 27 Expired
US4666291A Light-exposure apparatus Physics 27 Expired
US4447731A Exterior view examination apparatus Electricity 25 Expired
US4777641A Method and apparatus for alignment Physics 22 Expired
US6898305B2 Circuit pattern inspection method and apparatus Physics 19 Expired
US4814615A Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure Electricity 17 Expired
US4095905A Surface-defect detecting device Physics 16 Expired
US4242702A Apparatus for automatically checking external appearance of object Physics 15 Expired
US6373054B1 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Electricity 13 Expired
US4788577A Substrate surface deflecting device Physics 13 Expired
US4504045A Wafer transforming device Electricity 12 Expired
US7269280B2 Method and its apparatus for inspecting a pattern Physics 12 Expired
US5463667A Inspection method for soldered joints using x-ray imaging and apparatus therefor Physics 9 Expired
US7133550B2 Pattern inspection method and apparatus Electricity 9 Expired
US4708484A Projection alignment method and apparatus Physics 8 Expired
US6975754B2 Circuit pattern inspection method and apparatus Physics 8 Expired
US6717142B2 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Electricity 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.