Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity
US4454495A · kind A · utility
21Cited by
2References
8Claims
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Key dates
| Filing date | Aug 31, 1982 |
| Grant date | Jun 12, 1984 |
| Priority date | — |
| Expiry date | Aug 31, 2002 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S505/881
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.