Method for measuring resistances and capacitances of electronic components
US4460866A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 20, 1981 |
| Grant date | Jul 17, 1984 |
| Priority date | — |
| Expiry date | Jul 20, 2001 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/305
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for measuring a resistance and a capacitance of an electronic component utilizes electron beam measuring technology to impress a current I.sub.A by means of a pulsed electron beam on the component. A potential curve U(t) which arises during the pulse on the electronic component as a result of the impressed current is utilized together with the known current to determine the resistance R and the capacitance C by means of an appropriate selection of two measuring points U(t.sub.1) and U(t.sub.2) on the potential curve. PAC BACKGROUND OF THE INVENTION The invention relates to a method for measuring resistances and capacitances of eletronic components. Up to now, the measurement of resistances and capacitances of electronic components was carried out with a mechanical probe. The smallest measurable capacitance according to this method amounted to 1 pF. The loading effects associated with such probes affects accurate measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.