Process for preventing oxidation of copper film on ceramic body
US4464422A · kind A · utility
5Cited by
6References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1982 |
| Grant date | Aug 7, 1984 |
| Priority date | — |
| Expiry date | Nov 9, 2002 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K35/226
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A process for preventing the oxidation of a copper film formed on a ceramic body, which comprises the steps of forming a copper film on a ceramic body by a dry-plating process, treating the resultant copper film with a deactivating agent comprising at least one volatile hydrocarbon halide monomer by feeding the same into a vacuum chamber of a dry-plating apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.