Patent · US Expired

High-power cathode system for producing multilayers

US4488956A · kind A · utility

8Cited by

6References

8Claims

0Family size

Assignees

Leybold-Heraeus GmbH · DE
Glyco-Metal Werke · DE

Inventors

Michael Scherer · Crimmitschau, DE
Karl-Heinz Kubacha · Bruchköbel, DE

Key dates

Filing date	Dec 22, 1983
Grant date	Dec 18, 1984
Priority date	—
Expiry date	Dec 22, 2003

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3429
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

High-power cathode system for producing multilayers of different target materials on a substrate has at least two different target materials which abut one another at a boundary line in the field of a magnetic field generator thereof. The substrate is transported for coating across the boundary line, preferably perpendicularly.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.