Inventor · Crimmitschau, DE

Michael Scherer

33Patents
14h-index
43Co-inventors
81Inventor score

Filing activity: Dec 22, 1983 → May 20, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US5169509A Apparatus for the reactive coating of a substrate Electricity 68 Expired
US4931169A Apparatus for coating a substrate with dielectrics Chemistry; Metallurgy 61 Expired
US4548691A Thermally insulating glazing Physics 56 Expired
US5122252A Arrangement for the coating of substrates Electricity 46 Expired
US4572842A Method and apparatus for reactive vapor deposition of compounds of metal and semi-conductors Chemistry; Metallurgy 42 Expired
US4534841A Solar controlled glazing and method of producing glazing Emerging Cross-Sectional Technologies 37 Expired
US5558751A Dual cathode sputter coating apparatus Electricity 35 Expired
US4871434A Process for equipment to coat tools for machining and forming techniques with mechanically resistant layers Electricity 30 Expired
US5006219A Microwave cathode sputtering arrangement Electricity 23 Expired
US5026471A Device for coating a substrate Electricity 22 Expired
US5399252A Apparatus for coating a substrate by magnetron sputtering Electricity 22 Expired
US4619755A Sputtering system for cathode sputtering apparatus Electricity 19 Expired
US5423971A Arrangement for coating substrates Electricity 19 Expired
US5292419A Sputtering unit Chemistry; Metallurgy 14 Expired
US5698039A Process for cleaning a substrate using a barrier discharge Electricity 12 Expired
US5728280A Apparatus for coating substrates by cathode sputtering with a hollow target Electricity 11 Expired
US5097794A Apparatus for transporting substrates in a vacuum coating system Electricity 10 Expired
US4488956A High-power cathode system for producing multilayers Electricity 8 Expired
US5372693A Vacuum coating apparatus Chemistry; Metallurgy 7 Expired
US5716505A Apparatus for coating substrates by cathode sputtering with a hollow target Electricity 5 Expired
US8956511B2 Method for producing a multilayer coating and device for carrying out said method Electricity 5 Active
US5789670A Rain sensor Performing Operations; Transporting 3 Expired
US6391112B1 Heat-exchanging workholder for a vacuum unit Electricity 2 Expired
US5922182A Apparatus for coating substrates especially with magnetizable materials Electricity 2 Expired
US5653855A Method for manufacturing a rain sensor Performing Operations; Transporting 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.