Wafer transforming device
US4504045A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1982 |
| Grant date | Mar 12, 1985 |
| Priority date | — |
| Expiry date | Oct 14, 2002 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/30
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer transforming device defines an airtight space by means of a base, a hollow case, and a diaphragm type chuck which is fixed to the upper end of the case by suction. In this space, a large number of vertically moving elements are arranged at predetermined intervals. In the state in which a wafer is held by suction by means of the chuck and in which the chuck is held in contact with the upper ends of the vertically moving elements by supplying a vacuum pressure into the space, the vertically moving elements located within a required range are selectively actuated. Thus, the chuck is pushed up, and the wafer held on the chuck by the suction is transformed into a desired state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.