Bubbler cylinder and dip tube device
US4506815A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 1982 |
| Grant date | Mar 26, 1985 |
| Priority date | — |
| Expiry date | Dec 9, 2002 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B25/14
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An all welded square bottomed stainless steel cylinder and dip tube device for transferring by vapor deposition very reactive electronic grade organometallic liquid to a deposition system includes a top fill opening and inlet and outlet diaphragm valves, and is coated on the interior with PVF Teflon to several thousandths of an inch thickness. Contamination of the liquid is eliminated or at least substantially minimized since the device is stable in an upright position, the diaphragm valves each have a very small and inert area exposed to the liquid, and the coating serves as a barrier to contamination of the liquid by the metal of which the cylinder and dip tube are made.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.