Workpiece holder for polishing operation
US4512113A · kind A · utility
582Cited by
6References
7Claims
0Family size
Inventor
Key dates
| Filing date | Sep 23, 1982 |
| Grant date | Apr 23, 1985 |
| Priority date | — |
| Expiry date | Sep 23, 2002 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/30
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The workholder includes a carrier to which a flat perforated template is removably secured. An insert is removably mounted in each hole and removably supports a silicon wafer to facilitate polishing the wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.