Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts

US4520314A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Karl Asch · Springe, DE
• Johann Greschner · Neckartenzlingen, DE
• Michael Kallmeyer · Eppelheim, DE
• Werner Kulcke · Eppelheim, DE

Key dates

• Filing date: Oct 8, 1982
• Grant date: May 28, 1985
• Expiry date: Oct 8, 2002

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/07357
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe head arrangement for contacting a plurality of closely adjacent conductor lines 2 comprises a minimum of one probe head 3, where a plurality of fingers 4 together with a back 5 are made in one piece of monocrystalline silicon in semiconductor technique. A plurality of such probe heads 3 are composed to form a tester. At the beginning of each test it is determined which fingers 4 are to be, and are not to be placed onto the individual conductor lines 2 of a card 1 to be tested. Subsequently, the short and interruption tests can be implemented after the correlation of finger and probe head addresses with the conductor line addresses.