Inventor · Neckartenzlingen, DE

Johann Greschner

69Patents
26h-index
57Co-inventors
91Inventor score

Filing activity: May 8, 1978 → Sep 6, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US4502914A Method of making structures with dimensions in the sub-micrometer range Emerging Cross-Sectional Technologies 299 Expired
US4393127A Structure with a silicon body having through openings Emerging Cross-Sectional Technologies 88 Expired
US4806755A Micromechanical atomic force sensor head Emerging Cross-Sectional Technologies 68 Expired
US5283437A Pneumatically and electrostatically driven scanning tunneling microscope Emerging Cross-Sectional Technologies 61 Expired
US5051379A Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head Physics 59 Expired
US5283107A Modular multilayer interwiring structure Emerging Cross-Sectional Technologies 56 Expired
US5427599A System for stamping an optical storage disk Chemistry; Metallurgy 56 Expired
US4426584A Method of compensating the proximity effect in electron beam projection systems Electricity 52 Expired
US4589952A Method of making trenches with substantially vertical sidewalls in silicon through reactive ion etching Electricity 52 Expired
US5116462A Method of producing micromechanical sensors for the AFM/STM profilometry Physics 48 Expired
US4918033A PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides Emerging Cross-Sectional Technologies 47 Expired
US5814885A Very dense integrated circuit package Electricity 44 Expired
US4448865A Shadow projection mask for ion implantation and ion beam lithography Electricity 44 Expired
US6087199A Method for fabricating a very dense chip package Electricity 41 Expired
US4520314A Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts Physics 40 Expired
US4732646A Method of forming identically positioned alignment marks on opposite sides of a semiconductor wafer Emerging Cross-Sectional Technologies 40 Expired
US5646339A Force microscope and method for measuring atomic forces in multiple directions Emerging Cross-Sectional Technologies 35 Expired
US5578745A Calibration standards for profilometers and methods of producing them Emerging Cross-Sectional Technologies 34 Expired
US4522893A Contact device for releasably connecting electrical components Emerging Cross-Sectional Technologies 33 Expired
US4843315A Contact probe arrangement for electrically connecting a test system to the contact pads of a device to be tested Physics 30 Expired
US4642163A Method of making adhesive metal layers on substrates of synthetic material and device produced thereby Emerging Cross-Sectional Technologies 30 Expired
US5658472A Method for producing deep vertical structures in silicon substrates Electricity 29 Expired
US4871418A Process for fabricating arbitrarily shaped through holes in a component Emerging Cross-Sectional Technologies 29 Expired
US5998868A Very dense chip package Electricity 29 Expired
US5635337A Method for producing a multi-step structure in a substrate Physics 27 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.