Positioning method
US4531060A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1982 |
| Grant date | Jul 23, 1985 |
| Priority date | — |
| Expiry date | Sep 23, 2002 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for positioning an object with patterns being formed thereon, employs a first device for extracting first information relative to patterns in a first region on the object, a second device for extracting second information relative to patterns from a second region including the first region on the object, an operating circuit to calculate a degree of coincidence between the first information and the second information, and a detecting circuit for detecting a position of the first region in the second region, whereby the position of the object can be reproduced with high reproducibility in accordance with the position as detected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.