Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase
US4543465A · kind A · utility
83Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 26, 1983 |
| Grant date | Sep 24, 1985 |
| Priority date | — |
| Expiry date | Jul 26, 2003 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K10/006
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
In a microwave plasma source, a discharge space supplied with a microwave electric field is supplied with a DC magnetic field. A material to be ionized is introduced into the discharge space to produce plasma, whereby ions are extracted through an ion extracting system. A switch is provided for effecting through switching operation the change-over of the magnetic field applied to the discharge space from the intensity for the ignition of plasma to the intensity for ion extraction in succession to completion of the plasma ignition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.