Hidemi Koike
41Patents
18h-index
61Co-inventors
84Inventor score
Filing activity: May 30, 1980 → Jul 3, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6734687B1 | Apparatus for detecting defect in device and method of detecting defect | Physics | 113 | Expired |
| US4543465A | Microwave plasma source having improved switching operation from plasma ignition phase to normal ion extraction phase | Performing Operations; Transporting | 83 | Expired |
| US6664552B2 | Method and apparatus for specimen fabrication | Electricity | 73 | Expired |
| US6781125B2 | Method and apparatus for processing a micro sample | Electricity | 63 | Expired |
| US6717156B2 | Beam as well as method and equipment for specimen fabrication | Electricity | 56 | Expired |
| US5783830A | Sample evaluation/process observation system and method | Electricity | 42 | Expired |
| US6303932A | Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam | Electricity | 42 | Expired |
| US6927391B2 | Method and apparatus for processing a micro sample | Electricity | 39 | Expired |
| US5053678A | Microwave ion source | Electricity | 36 | Expired |
| US4433228A | Microwave plasma source | Electricity | 33 | Expired |
| US5976328A | Pattern forming method using charged particle beam process and charged particle beam processing system | Electricity | 32 | Expired |
| US4633138A | Ion implanter | Physics | 31 | Expired |
| US6960765B2 | Probe driving method, and probe apparatus | Physics | 28 | Expired |
| US4393333A | Microwave plasma ion source | Electricity | 26 | Expired |
| US7205554B2 | Method and apparatus for processing a micro sample | Electricity | 23 | Expired |
| US4658143A | Ion source | Electricity | 23 | Expired |
| US4801847A | Charged particle accelerator using quadrupole electrodes | Electricity | 21 | Expired |
| US7205560B2 | Method and apparatus for processing a micro sample | Electricity | 21 | Expired |
| US7550750B2 | Method and apparatus for processing a micro sample | Electricity | 18 | Active |
| US4409520A | Microwave discharge ion source | Electricity | 18 | Expired |
| US6476387B1 | Method and apparatus for observing or processing and analyzing using a charged beam | Electricity | 18 | Expired |
| US7465945B2 | Method and apparatus for processing a micro sample | Electricity | 17 | Active |
| US5216253A | Ion implantation apparatus with variable width slits providing an ion beam of high purity | Electricity | 17 | Expired |
| US7268356B2 | Method and apparatus for specimen fabrication | Electricity | 16 | Expired |
| US6794663B2 | Method and apparatus for specimen fabrication | Electricity | 16 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.