Effusion type evaporator cell for vacuum evaporators

US4543467A · kind A · utility

Assignee

• Balzers Aktiengesellschaft · LI

Inventors

• Ignaz Eisele · Icking, DE
• Bernhard Bullemer · Munich, DE
• Andreas Beck · Mertingen, DE

Key dates

• Filing date: Oct 25, 1983
• Grant date: Sep 24, 1985
• Expiry date: Oct 25, 2003

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/243
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Vapor sources for vacuum evaporators in which the evaporation rate has hitherto been adjusted by varying the temperature of the vessel containing the evaporative substances, have a very large time constant, and an approximately exponential control characteristic. The invention substantially reduces the time constant in an effusion evaporator cell by providing that the rate is adjusted by means of a mechanical slide, preferably of boron nitride or graphite, placed in front of the vapor escape aperture or apertures of the evaporator vessel.