Patent assignee · LI · COMPANY

Balzers Aktiengesellschaft

184Patents
0Active
184Granted
43Portfolio score

Filing activity: May 26, 1978 → Apr 18, 2000

Most-cited patents

PatentTitleAreaCited byStatus
US5422139A Method for a reactive surface treatment of a workpiece and a treatment chamber for practicing such method Electricity 564 Expired
US5738825A Optical biosensor matrix Physics 191 Expired
US4448653A Cathode arrangement for sputtering material from a target in a cathode sputtering unit Electricity 141 Expired
US5897942A Coated body, method for its manufacturing as well as its use Emerging Cross-Sectional Technologies 95 Expired
US4346123A Method of depositing hard wear-resistant coatings on substrates Chemistry; Metallurgy 88 Expired
US4990047A Vacuum apparatus Emerging Cross-Sectional Technologies 87 Expired
US4622121A Apparatus for coating materials by cathode sputtering Electricity 76 Expired
US6740393B1 DLC coating system and process and apparatus for making coating system Emerging Cross-Sectional Technologies 73 Expired
US5868482A Color wheel and picture generation unit with a color wheel Physics 69 Expired
US5033538A Workpiece carrier for a disk-shaped workpiece as well as a vacuum process space Emerging Cross-Sectional Technologies 62 Expired
US5618575A Process and apparatus for the production of a metal oxide layer Electricity 51 Expired
US5515986A Plasma treatment apparatus and method for operating same Emerging Cross-Sectional Technologies 48 Expired
US5180000A Workpiece carrier with suction slot for a disk-shaped workpiece Electricity 48 Expired
US4448802A Method and apparatus for evaporating material under vacuum using both an arc discharge and electron beam Electricity 47 Expired
US5075181A High hardness/high compressive stress multilayer coated tool Emerging Cross-Sectional Technologies 45 Expired
US5616373A Plasma CVD method for producing a diamond coating Electricity 44 Expired
US5909995A Transport device for workpieces in a vacuum system Emerging Cross-Sectional Technologies 43 Expired
US5981899A Capacitively coupled RF-plasma reactor Electricity 43 Expired
US5090900A Workpiece support for vacuum chamber Emerging Cross-Sectional Technologies 40 Expired
US4877505A Method and apparatus for application of coatings on substrates Chemistry; Metallurgy 39 Expired
US5292417A Method for reactive sputter coating at least one article Electricity 38 Expired
US5310607A Hard coating; a workpiece coated by such hard coating and a method of coating such workpiece by such hard coating Chemistry; Metallurgy 38 Expired
US5211759A Method for a doublesided coating of optical substrates Chemistry; Metallurgy 37 Expired
US5336326A Method of and apparatus for a direct voltage arc discharge enhanced reactive treatment of objects Emerging Cross-Sectional Technologies 36 Expired
US4543467A Effusion type evaporator cell for vacuum evaporators Chemistry; Metallurgy 36 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.