Robot precision probe positioner with guidance optics
US4544889A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 1983 |
| Grant date | Oct 1, 1985 |
| Priority date | — |
| Expiry date | Sep 12, 2003 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D3/20
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
This precision probe uses optical feedback in the X and Y dimensions to locate a microprobe in the airspace over a test pad, and uses pressure feedback in the Z dimension to control Z approach and penetration. The precision probe inspects a target by coarse positioning a guided microprobe to make contact at a selected probe pad. Guidance is optical, by light reflected, from a target by a dual mirror focusing system of concave mirror and flat mirror, to a transducer. Up and down Z positioning of the microprobe is carried out by a shaft positioned by an air diaphragm which is driven to the target by applied air pressure delivered via an air tube, providing the desired penetration of microprobe to microtarget. The probe is retracted by atmospheric pressure. In operation, the microprobe is coarsely positioned by the computer and the coarse positioner in the air space above the X-Y coordinates for the probe pad, but tolerances may be such that the microprobe is not precisely positioned within the airspace periphery of the probe pad. Assuming that the precision required is greater than the tolerances available or desired, fine positioning is required. Fine positioning with guidance sensi…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.