Integral flow sensor and channel assembly
US4548078A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 1984 |
| Grant date | Oct 22, 1985 |
| Priority date | — |
| Expiry date | Jul 25, 2004 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/698
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an integral flow sensor and channel assembly comprising a flow sensor having a sensing element integral to a semiconductor body. The assembly further comprises support structure for supporting the flow sensor, the support structure having a first surface. An enclosed flow channel comprises the first surface formed into a groove running below the sensing element. The flow channel comprises an inlet and an outlet for providing flow across the sensing element. The sensing element is located in the flow channel between the inlet and the outlet. The support structure comprises apparatus for flip-chip mounting the semiconductor body, and the semiconductor body is flip-chip mounted so that the sensing element is positioned over the groove in the support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.