Inventor · Shorewood, MN, US

Robert E. Higashi

80Patents
25h-index
52Co-inventors
91Inventor score

Filing activity: Sep 30, 1982 → Jul 14, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US4651564A Semiconductor device Physics 219 Expired
US4501144A Flow sensor Physics 195 Expired
US5895233A Integrated silicon vacuum micropackage for infrared devices Electricity 148 Expired
US6036872A Method for making a wafer-pair having sealed chambers Performing Operations; Transporting 108 Expired
US4472239A Method of making semiconductor device Physics 92 Expired
US5300915A Thermal sensor Emerging Cross-Sectional Technologies 88 Expired
US4683159A Semiconductor device structure and processing Emerging Cross-Sectional Technologies 80 Expired
US4682503A Microscopic size, thermal conductivity type, air or gas absolute pressure sensor Physics 77 Expired
US4548078A Integral flow sensor and channel assembly Physics 67 Expired
US6287940A Dual wafer attachment process Electricity 66 Expired
US6359333B1 Wafer-pair having deposited layer sealed chambers Physics 64 Expired
US4966037A Cantilever semiconductor device Electricity 55 Expired
US4696188A Semiconductor device microstructure Electricity 54 Expired
US4624137A Semiconductor device Electricity 54 Expired
US6238085A Differential thermal analysis sensor Physics 50 Expired
US5220189A Micromechanical thermoelectric sensor element Emerging Cross-Sectional Technologies 49 Expired
US6322247A Microsensor housing Physics 41 Expired
US5220188A Integrated micromechanical sensor element Electricity 40 Expired
US4914742A Thin film orthogonal microsensor for air flow and method Emerging Cross-Sectional Technologies 39 Expired
US5449910A Infrared radiation imaging array with compound sensors forming each pixel Electricity 37 Expired
US5869749A Micromachined integrated opto-flow gas/liquid sensor Physics 36 Expired
US4739657A Resistance with linear temperature coefficient Physics 36 Expired
US5886249A Micromachined integrated opto-flow gas/liquid sensor Physics 34 Expired
US4885938A Flowmeter fluid composition correction Physics 28 Expired
US7015457B2 Spectrally tunable detector Electricity 25 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.