Robert E. Higashi
80Patents
25h-index
52Co-inventors
91Inventor score
Filing activity: Sep 30, 1982 → Jul 14, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4651564A | Semiconductor device | Physics | 219 | Expired |
| US4501144A | Flow sensor | Physics | 195 | Expired |
| US5895233A | Integrated silicon vacuum micropackage for infrared devices | Electricity | 148 | Expired |
| US6036872A | Method for making a wafer-pair having sealed chambers | Performing Operations; Transporting | 108 | Expired |
| US4472239A | Method of making semiconductor device | Physics | 92 | Expired |
| US5300915A | Thermal sensor | Emerging Cross-Sectional Technologies | 88 | Expired |
| US4683159A | Semiconductor device structure and processing | Emerging Cross-Sectional Technologies | 80 | Expired |
| US4682503A | Microscopic size, thermal conductivity type, air or gas absolute pressure sensor | Physics | 77 | Expired |
| US4548078A | Integral flow sensor and channel assembly | Physics | 67 | Expired |
| US6287940A | Dual wafer attachment process | Electricity | 66 | Expired |
| US6359333B1 | Wafer-pair having deposited layer sealed chambers | Physics | 64 | Expired |
| US4966037A | Cantilever semiconductor device | Electricity | 55 | Expired |
| US4696188A | Semiconductor device microstructure | Electricity | 54 | Expired |
| US4624137A | Semiconductor device | Electricity | 54 | Expired |
| US6238085A | Differential thermal analysis sensor | Physics | 50 | Expired |
| US5220189A | Micromechanical thermoelectric sensor element | Emerging Cross-Sectional Technologies | 49 | Expired |
| US6322247A | Microsensor housing | Physics | 41 | Expired |
| US5220188A | Integrated micromechanical sensor element | Electricity | 40 | Expired |
| US4914742A | Thin film orthogonal microsensor for air flow and method | Emerging Cross-Sectional Technologies | 39 | Expired |
| US5449910A | Infrared radiation imaging array with compound sensors forming each pixel | Electricity | 37 | Expired |
| US5869749A | Micromachined integrated opto-flow gas/liquid sensor | Physics | 36 | Expired |
| US4739657A | Resistance with linear temperature coefficient | Physics | 36 | Expired |
| US5886249A | Micromachined integrated opto-flow gas/liquid sensor | Physics | 34 | Expired |
| US4885938A | Flowmeter fluid composition correction | Physics | 28 | Expired |
| US7015457B2 | Spectrally tunable detector | Electricity | 25 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.