Patent · US Expired

Process for preparing negative relief images with cationic photopolymerization

US4551418A · kind A · utility

20Cited by
3References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 19, 1985
Grant dateNov 5, 1985
Priority date
Expiry dateFeb 19, 2005

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/265
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Negative relief images are generated by a process comprising the use of cationic polymerization and plasma etching.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.