Inventor · Austin, TX, US

Carlton G. Willson

42Patents
20h-index
74Co-inventors
88Inventor score

Filing activity: Dec 3, 1979 → Feb 22, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US4491628A Positive- and negative-working resist compositions with acid generating photoinitiator and polymer with acid labile groups pendant from polymer backbone Emerging Cross-Sectional Technologies 643 Expired
US6334960B1 Step and flash imprint lithography Emerging Cross-Sectional Technologies 458 Expired
US6908861B2 Method for imprint lithography using an electric field Electricity 133 Expired
US6719915B2 Step and flash imprint lithography Emerging Cross-Sectional Technologies 130 Expired
US4552833A Radiation sensitive and oxygen plasma developable resist Physics 94 Expired
US4657845A Positive tone oxygen plasma developable photoresist Physics 76 Expired
US4939070A Thermally stable photoresists with high sensitivity Emerging Cross-Sectional Technologies 74 Expired
US4908298A Method of creating patterned multilayer films for use in production of semiconductor circuits and systems Emerging Cross-Sectional Technologies 63 Expired
US6964793B2 Method for fabricating nanoscale patterns in light curable compositions using an electric field Performing Operations; Transporting 54 Expired
US7229273B2 Imprint lithography template having a feature size under 250 nm Emerging Cross-Sectional Technologies 45 Expired
US4810601A Top imaged resists Emerging Cross-Sectional Technologies 42 Expired
US5545509A Photoresist composition with photosensitive base generator Physics 37 Expired
US4397937A Positive resist compositions Physics 36 Expired
US4458994A High resolution optical lithography method and apparatus having excimer laser light source and stimulated Raman shifting Electricity 36 Expired
US5322765A Dry developable photoresist compositions and method for use thereof Physics 31 Expired
US4767723A Process for making self-aligning thin film transistors Emerging Cross-Sectional Technologies 26 Expired
US6890688B2 Lithographic template and method of formation and use Physics 25 Expired
US4464460A Process for making an imaged oxygen-reactive ion etch barrier Physics 24 Expired
US5055439A Photoacid generating composition and sensitizer therefor Physics 22 Expired
US5342727A Copolymers of 4-hydroxystyrene and alkyl substituted-4-hydroxystyrene in admixture with a photosensitizer to form a photosensitive composition Physics 21 Expired
US4551418A Process for preparing negative relief images with cationic photopolymerization Physics 20 Expired
US5250395A Process for imaging of photoresist including treatment of the photoresist with an organometallic compound Physics 19 Expired
US4284706A Lithographic resist composition for a lift-off process Physics 18 Expired
US4522911A Deep ultra-violet lithographic resists with diazohomotetramic acid compounds Physics 16 Expired
US9223202B2 Method of automatic fluid dispensing for imprint lithography processes Electricity 14 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.