Method and apparatus for controlling sample temperature
US4565601A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 28, 1984 |
| Grant date | Jan 21, 1986 |
| Priority date | — |
| Expiry date | Nov 28, 2004 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/20
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
This invention relates to a method and apparatus for controlling temperature of a sample and is intended to prevent a sample from being deformed by the pressure of a heat transmission gas by mounting and fixing the sample being mounted and processed in a vacuum on and to the sample stand and supplying the heat transmission gas to the gap between the under surface of the sample thus fixed and the sample stand; effectively control the temperature of the sample being processed in a vacuum by limiting the size of the gap between the under surface of the sample and the sample stand; and make the heat transmission gas least affect the process by limiting the flow of the heat transmission gas in the vacuum process chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.