Tsunehiko Tsubone
96Patents
19h-index
51Co-inventors
87Inventor score
Filing activity: Nov 28, 1984 → Oct 28, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD557226S1 | Electrode cover for a plasma processing apparatus | General | 597 | Expired |
| US4565601A | Method and apparatus for controlling sample temperature | Electricity | 382 | Expired |
| US5320982A | Wafer cooling method and apparatus | Emerging Cross-Sectional Technologies | 101 | Expired |
| US5685684A | Vacuum processing system | Emerging Cross-Sectional Technologies | 90 | Expired |
| US4824309A | Vacuum processing unit and apparatus | Emerging Cross-Sectional Technologies | 74 | Expired |
| US5078851A | Low-temperature plasma processor | Electricity | 62 | Expired |
| US5314509A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 57 | Expired |
| US5445484A | Vacuum processing system | Emerging Cross-Sectional Technologies | 48 | Expired |
| US6048434A | Substrate holding system including an electrostatic chuck | Emerging Cross-Sectional Technologies | 47 | Expired |
| US5792304A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 40 | Expired |
| US5906684A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 37 | Expired |
| US4911812A | Plasma treating method and apparatus therefor | Electricity | 36 | Expired |
| US5784799A | Vacuum processing apparatus for substate wafers | Emerging Cross-Sectional Technologies | 35 | Expired |
| US6180019A | Plasma processing apparatus and method | Electricity | 31 | Expired |
| US6388382B1 | Plasma processing apparatus and method | Electricity | 31 | Expired |
| US5673750A | Vacuum processing method and apparatus | Electricity | 25 | Expired |
| US6833051B2 | Plasma processing apparatus and method | Electricity | 23 | Expired |
| US6756737B2 | Plasma processing apparatus and method | Electricity | 21 | Expired |
| US5085750A | Plasma treating method and apparatus therefor | Electricity | 20 | Expired |
| US5349762A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5961774A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6524428B2 | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5553396A | Vacuum processing apparatus and operating method therefor | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6217705A | Method of holding substrate and substrate holding system | Emerging Cross-Sectional Technologies | 17 | Expired |
| US5663884A | Multiprocessing apparatus | Emerging Cross-Sectional Technologies | 15 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.