Modular V-CVD diffusion furnace
US4573431A · kind A · utility
27Cited by
11References
4Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 22, 1985 |
| Grant date | Mar 4, 1986 |
| Priority date | — |
| Expiry date | Jul 22, 2005 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B31/103
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A novel modular V-CVD diffusion furnace includes a cylindrical quartz diffusion tube having integral end flanges, a first metallic sealing plate having gas ports removably fastened to one flange, a second metallic sealing plate having a plurality of precisely aligned gas injection tube receiving apertures removably fastened to the other flange, a like plurality of gas injection tubes slidably mounted in and sealed to corresponding gas injection tube receiving apertures, and a cylindrical quartz liner slidably mounted in the cylindrical diffusion tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.