Inventor · Westford, MA, US

Robert F. Sarkozy

6Patents
6h-index
5Co-inventors
48Inventor score

Filing activity: Nov 16, 1983 → Dec 10, 1987

Most-cited inventions

PatentTitleAreaCited byStatus
US4854266A Cross-flow diffusion furnace Chemistry; Metallurgy 478 Expired
US4793283A Apparatus for chemical vapor deposition with clean effluent and improved product yield Chemistry; Metallurgy 71 Expired
US4573431A Modular V-CVD diffusion furnace Chemistry; Metallurgy 27 Expired
US4556584A Method for providing substantially waste-free chemical vapor deposition of thin-film on semiconductor substrates Emerging Cross-Sectional Technologies 16 Expired
US4484538A Apparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafers Chemistry; Metallurgy 16 Expired
US4624638A CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly Emerging Cross-Sectional Technologies 8 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.