Robert F. Sarkozy
6Patents
6h-index
5Co-inventors
48Inventor score
Filing activity: Nov 16, 1983 → Dec 10, 1987
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4854266A | Cross-flow diffusion furnace | Chemistry; Metallurgy | 478 | Expired |
| US4793283A | Apparatus for chemical vapor deposition with clean effluent and improved product yield | Chemistry; Metallurgy | 71 | Expired |
| US4573431A | Modular V-CVD diffusion furnace | Chemistry; Metallurgy | 27 | Expired |
| US4556584A | Method for providing substantially waste-free chemical vapor deposition of thin-film on semiconductor substrates | Emerging Cross-Sectional Technologies | 16 | Expired |
| US4484538A | Apparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafers | Chemistry; Metallurgy | 16 | Expired |
| US4624638A | CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly | Emerging Cross-Sectional Technologies | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.