Apparatus for transferring thin sheet-like article such as wafers
US4601627A · kind A · utility
14Cited by
7References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 2, 1984 |
| Grant date | Jul 22, 1986 |
| Priority date | — |
| Expiry date | Mar 2, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An apparatus for transferring thin sheet-like articles such as wafers is disclosed. The apparatus is provided with opposed pairs of contact elements capable of adjusting the distance between said pairs of contact elements. The thin sheet-like articles are transferred one by from a transfer passage to a treating station while they are clamped between said pairs of contact elements by a transfer mechanism movable between the transfer passage and the treating station.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.