Multiple wafer holder for a wafer transfer system
US4602713A · kind A · utility
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6References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 22, 1983 |
| Grant date | Jul 29, 1986 |
| Priority date | — |
| Expiry date | Sep 22, 2003 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67326
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A multiple wafer holder generally of the size and shape of a standard wafer has on its front surface a plurality of pockets. The edge of each pocket is generally V-shaped and grooved so that wafers of different sizes can be carried by each holder and more than one wafer can be transported together into the processing chamber of an implanter from a cassette.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.