Inventor · Newburyport, MA, US

Leo V. Klos

14Patents
7h-index
21Co-inventors
66Inventor score

Filing activity: Sep 22, 1983 → Apr 8, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US7138768B2 Indirectly heated cathode ion source Electricity 35 Expired
US4744709A Low deflection force sensitive pick Emerging Cross-Sectional Technologies 14 Expired
US5629528A Charged particle beam system having beam-defining slit formed by rotating cyclinders Electricity 14 Expired
US6403972B1 Methods and apparatus for alignment of ion beam systems using beam current sensors Electricity 11 Expired
US7102139B2 Source arc chamber for ion implanter having repeller electrode mounted to external insulator Electricity 9 Expired
US7491947B2 Technique for improving performance and extending lifetime of indirectly heated cathode ion source Electricity 9 Active
US7276847B2 Cathode assembly for indirectly heated cathode ion source Electricity 8 Expired
US6448567B1 Method and apparatus for shielding a valve gate and other valve parts Mechanical Engineering; Lighting; Heating 7 Expired
US4931776A Fluid flow sensor with flexible vane Electricity 7 Expired
US8071956B2 Cleaning of an extraction aperture of an ion source Electricity 1 Active
US8455839B2 Cleaning of an extraction aperture of an ion source Electricity 1 Active
US8049192B2 Apparatus and system for controlling ion ribbon beam uniformity in an ion implanter Electricity 1 Active
US9076625B2 Indirectly heated cathode cartridge design Electricity 0 Active
US4602713A Multiple wafer holder for a wafer transfer system Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.