Patent · US Expired

Distance measuring interferometer and method of use

US4606638A · kind A · utility

66Cited by
5References
5Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 3, 1983
Grant dateAug 19, 1986
Priority date—
Expiry dateNov 3, 2003

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B2290/70
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Apparatus is disclosed for the measurement of the absolute distance between a plano test and a plano reference surface which are in close proximity to each other. The preferred way of accomplishing this is with a polarization phase modulated Fizeau interferometer in which the reference surface is a front surface polarizer. The modulated interference pattern is photosensed with an array camera, and the signals processed to provide the absolute distance between the plano test surface and the plano reference surface. A method is also disclosed, using the instant invention, for determining the flying height of a magnetic head assembly used in computer mass storage systems.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.