Apparatus for processing semiconductor wafers or the like
US4610748A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 1984 |
| Grant date | Sep 9, 1986 |
| Priority date | — |
| Expiry date | Dec 10, 2004 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67316
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A disk boat assembly for holding workpieces to be processed within a chemical reaction processing apparatus during the chemical vapor process. The boat assembly includes a pair of electrically conductive rail members held rigidly and radially apart between two dielectric end holding members that electrically isolate the two rail members. A plurality of disk like plates are connected respectively to the two rail members and are interleaved such that adjacent disk plates are electrically isolated. Each disk plate includes pairs of bores formed therein with each pair extending radially outward from the center of the disk. Insertable pins are placed in a respective pair of bores, the distance therebetween of which can be extended by insertion in an additional pair of bores lying further from the center of the disk so that variable diameter workpieces can be held on the broad surfaces of each disk plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.