Resonant hollow beam and method
US4614119A · kind A · utility
30Cited by
4References
54Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 8, 1985 |
| Grant date | Sep 30, 1986 |
| Priority date | — |
| Expiry date | Mar 8, 2005 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/019
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microminiature resonant hollow beam sensor is manufactured by micromachining and microfabrication techniques. Specifically, a sensor is formed by etching troughs in a pair of silicon substrates, joining the substrates face-to-face, and etching away unwanted material to free the resonant hollow beam sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.