Inventor · Boston, MA, US

Stephen D. Senturia

33Patents
20h-index
38Co-inventors
85Inventor score

Filing activity: Apr 25, 1977 → Aug 17, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US5106461A High-density, multi-level interconnects, flex circuits, and tape for tab Emerging Cross-Sectional Technologies 286 Expired
US5757536A Electrically-programmable diffraction grating Physics 166 Expired
US5932940A Microturbomachinery Mechanical Engineering; Lighting; Heating 142 Expired
US5905571A Optical apparatus for forming correlation spectrometers and optical processors Physics 130 Expired
US6392313B1 Microturbomachinery Mechanical Engineering; Lighting; Heating 113 Expired
US4943750A Electrostatic micromotor Electricity 102 Expired
US5043043A Method for fabricating side drive electrostatic micromotor Electricity 96 Expired
US4423371A Methods and apparatus for microdielectrometry Physics 92 Expired
US4980034A High-density, multi-level interconnects, flex circuits, and tape for TAB Electricity 70 Expired
US4896098A Turbulent shear force microsensor Physics 69 Expired
US6329738A Precision electrostatic actuation and positioning Performing Operations; Transporting 69 Expired
US4997521A Electrostatic micromotor Electricity 65 Expired
US4926696A Optical micropressure transducer Electricity 53 Expired
US4942767A Pressure transducer apparatus Electricity 40 Expired
US5955659A Electrostatically-actuated structures for fluid property measurements and related methods Physics 39 Expired
US4158807A Gapped gate charge-flow transistor with a thin film sensor having two modes of conduction within the gapped gate used to sense a property of the ambient environment Electricity 37 Expired
US4899581A Method and apparatus for the quantitative measurement of adhesion of thin films Physics 30 Expired
US4614119A Resonant hollow beam and method Performing Operations; Transporting 30 Expired
US4823607A Released film structures and method of measuring film properties Physics 28 Expired
US5378330A Method for polishing micro-sized structures Chemistry; Metallurgy 25 Expired
US7196789B2 Light processor providing wavelength control and method for same Physics 19 Expired
US4352059A Determination of moisture level in materials Physics 19 Expired
US5834627A Calorimetric gas sensor Physics 17 Expired
US4236121A Oscillators including charge-flow transistor logic elements Electricity 16 Expired
US4908509A Traction and reaction force microsensor Physics 15 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.