Stephen D. Senturia
33Patents
20h-index
38Co-inventors
85Inventor score
Filing activity: Apr 25, 1977 → Aug 17, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5106461A | High-density, multi-level interconnects, flex circuits, and tape for tab | Emerging Cross-Sectional Technologies | 286 | Expired |
| US5757536A | Electrically-programmable diffraction grating | Physics | 166 | Expired |
| US5932940A | Microturbomachinery | Mechanical Engineering; Lighting; Heating | 142 | Expired |
| US5905571A | Optical apparatus for forming correlation spectrometers and optical processors | Physics | 130 | Expired |
| US6392313B1 | Microturbomachinery | Mechanical Engineering; Lighting; Heating | 113 | Expired |
| US4943750A | Electrostatic micromotor | Electricity | 102 | Expired |
| US5043043A | Method for fabricating side drive electrostatic micromotor | Electricity | 96 | Expired |
| US4423371A | Methods and apparatus for microdielectrometry | Physics | 92 | Expired |
| US4980034A | High-density, multi-level interconnects, flex circuits, and tape for TAB | Electricity | 70 | Expired |
| US4896098A | Turbulent shear force microsensor | Physics | 69 | Expired |
| US6329738A | Precision electrostatic actuation and positioning | Performing Operations; Transporting | 69 | Expired |
| US4997521A | Electrostatic micromotor | Electricity | 65 | Expired |
| US4926696A | Optical micropressure transducer | Electricity | 53 | Expired |
| US4942767A | Pressure transducer apparatus | Electricity | 40 | Expired |
| US5955659A | Electrostatically-actuated structures for fluid property measurements and related methods | Physics | 39 | Expired |
| US4158807A | Gapped gate charge-flow transistor with a thin film sensor having two modes of conduction within the gapped gate used to sense a property of the ambient environment | Electricity | 37 | Expired |
| US4899581A | Method and apparatus for the quantitative measurement of adhesion of thin films | Physics | 30 | Expired |
| US4614119A | Resonant hollow beam and method | Performing Operations; Transporting | 30 | Expired |
| US4823607A | Released film structures and method of measuring film properties | Physics | 28 | Expired |
| US5378330A | Method for polishing micro-sized structures | Chemistry; Metallurgy | 25 | Expired |
| US7196789B2 | Light processor providing wavelength control and method for same | Physics | 19 | Expired |
| US4352059A | Determination of moisture level in materials | Physics | 19 | Expired |
| US5834627A | Calorimetric gas sensor | Physics | 17 | Expired |
| US4236121A | Oscillators including charge-flow transistor logic elements | Electricity | 16 | Expired |
| US4908509A | Traction and reaction force microsensor | Physics | 15 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.