Illumination optical arrangement
US4619508A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 1985 |
| Grant date | Oct 28, 1986 |
| Priority date | — |
| Expiry date | Apr 23, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/0098
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination optical arrangement comprises light source means emitting a coherent light beam, and means for forming a substantially incoherent light source from the coherent light beam. The incoherent light source forming means includes means for periodically deflecting the coherent light beam and scanning a predetermined scanning area by the coherent light beam, and optical means for forming a plurality of optical paths for directing the coherent light beam passed through the predetermined scanning area to a plurality of different secondary scanning areas. Each of the plurality of secondary scanning areas is scanned by the periodically deflected coherent light beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.