Magnetron plasma reactor
US4623417A · kind A · utility
11Cited by
4References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 23, 1985 |
| Grant date | Nov 18, 1986 |
| Priority date | — |
| Expiry date | Aug 23, 2005 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A magnetron plasma reactor wherein the susceptor is an aluminum arm extending into approximately the middle of a solenoidal magnetic field generated by a dc current.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.