CVD boat loading mechanism having a separable, low profile cantilevered paddle assembly
US4624638A · kind A · utility
8Cited by
8References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 29, 1984 |
| Grant date | Nov 25, 1986 |
| Priority date | — |
| Expiry date | Nov 29, 2004 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A semi-cylindrical low-profile cantilevered paddle of refractory material is separably clamped to a cantilevered arm fastened to a movable boat-loader. A clamping mechanism is disclosed that preferably includes spaced brackets fastened to the arm defining retaining loops for slidably receiving the paddle. A flexible, stress-relief saddle portion is provided on one of the brackets. The rugged and breakage-resistant semi-cylindrical paddle is inexpensive to procure and replace, and its low profile makes it possible to adapt existing CVD furnaces for operation with larger semiconductor wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.