Method of making adhesive metal layers on substrates of synthetic material and device produced thereby

US4642163A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Johann Greschner · Neckartenzlingen, DE
• Friedrich W. Schwerdt · Sindelfingen, DE
• Hans-Joachim Trumpp · Stuttgart, DE

Key dates

• Filing date: Oct 31, 1983
• Grant date: Feb 10, 1987
• Expiry date: Oct 31, 2003

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/31
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

A method of improving the adhesion between a synthetic substrate and metallized layers deposited thereon. A glass resin layer is spin-coated onto an epoxide substrate. The glass layer is covered by a photoresist layer which is roughened by reactive ion etching. The roughened contour of the photoresist layer is transferred via reactive ion etching to form a perforation pattern in the glass layer. The substrate is then etched vertically and horizontally to produce recesses in the substrate having overhanging walls. A thin copper layer is sputtered onto the substrate and copper conductors are sputtered onto the thin copper layer, the copper layers filling the recesses. The recesses and overhangs form mortices in the substrate, and the copper layers within the recess form tenons which fittingly engage with the mortices to produce adhesion between the substrate and the metallized layers in the order of 1000 n/m.