Ellipsometric method and apparatus
US4647207A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 1985 |
| Grant date | Mar 3, 1987 |
| Priority date | — |
| Expiry date | May 24, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/211
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An ellipsometric method and apparatus for studying physical properties of a testpiece provides that during the measuring operation the angular positions of a polarizing means and an analyzing means disposed upstream and downstream of the testpiece remain fixed. Two or more discrete, mutually different predetermined states of polarization of the radiation employed are produced between the polarizing means and the testpiece and/or between the testpiece and the analyzing means, by polarization modulating elements which are disposed in the path of the radiation. In each discrete state of polarization, the intensity of the radiation which is polarized in the analyzer is measured and evaluated for determining the polarization properties of the testpiece in a computer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.