Lars Stiblert
13Patents
9h-index
12Co-inventors
69Inventor score
Filing activity: Apr 16, 1980 → Aug 16, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5631171A | Method and instrument for detection of change of thickness or refractive index for a thin film substrate | Emerging Cross-Sectional Technologies | 180 | Expired |
| US4647207A | Ellipsometric method and apparatus | Physics | 109 | Expired |
| US5494829A | Devices and methods for detection of an analyte based upon light interference | Emerging Cross-Sectional Technologies | 95 | Expired |
| US4332476A | Method and apparatus for studying surface properties | Physics | 68 | Expired |
| US4558012A | Method and member for detecting and/or measuring the concentration of a chemical substance | Physics | 62 | Expired |
| US8122846B2 | Platforms, apparatuses, systems and methods for processing and analyzing substrates | Emerging Cross-Sectional Technologies | 47 | Active |
| US4655595A | Ellipsometric method and apparatus for studying physical properties of the surface of a testpiece | Physics | 43 | Expired |
| US8160351B2 | Method and apparatus for mura detection and metrology | Physics | 20 | Active |
| US6948254B2 | Method for calibration of a metrology stage | Physics | 9 | Expired |
| US7148971B2 | Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surface | Physics | 2 | Expired |
| US8822879B2 | Writing apparatuses and methods | Electricity | 1 | Active |
| US7912671B2 | Method for measuring the position of a mark in a deflector system | Physics | 1 | Active |
| US7365829B2 | Method and apparatus for image formation | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.