Semiconductor device
US4651564A · kind A · utility
219Cited by
19References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 29, 1986 |
| Grant date | Mar 24, 1987 |
| Priority date | — |
| Expiry date | Apr 29, 2006 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6845
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow sensor comprising a pair of thin film heat sensors and a thin film heater is disclosed. A base supports the sensors and heater out of contact with the base with the sensors disposed on opposite sides of the heater. Also disclosed is a semiconductor device comprising a thin film member which comprises an electrical element. The device further comprises a semiconductor body supporting the thin film member out of contact with the body and apparatus for electrically pulsing the electrical element. Such devices are the basis for many types of apparatus, including flow sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.